Abstract
Abstract For the past few years capacitive LIGA acceleration sensors have been fabricated at the Karlsruhe Nuclear Research Center. The advantages of LIGA acceleration sensors are their high zero-acceleration capacitance of 5 pF, temperature-compensated design with low offset temperature coefficient (TCO = 1.5 × 10−4 FSO K−1) and high linearity. In addition, a high-precision readout circuit has been developed. The electronic circuit's distinguishing feature is its extremely low noise, so that capacitance changes of 5 aF Hz −1 2 can be detected. Combined with a 1g LIGA acceleration sensor, a resolution of 1μg Hz −1 2 has been achieved. A feedback system has been developed for a further improvement of linearity. The electronic circuit has been realized as a multichip module (MCM) in multilayer thick-film technique on a 10 mm × 20 mm Al2O3 substrate. The final result is a sensor system with excellent properties as regards temperature behaviour, dynamic range and resolution.
Published Version
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