High Precision Modeling and Identification of the Near Transition Sliding Friction in a Mechanical Stage

Abstract

Mechanical stages are common but very important tools to all the fields in the modern world. However, with the increasing demand for high-precision stage capability, it is found that the frictional characteristics play a more vital role for the stage motion and are worth of a careful investigation. Therefore, the problem of dynamic behavior and parameter identification for the sliding friction in a normal mechanical stage system operated in long range is studied in this paper, especially for the near transition regime between the presliding and sliding friction behaviors. A dynamic model and its corresponding identification method are proposed such that all the system parameters can identified from the derived relationships in a systematical way. The results show that the proposed method indeed works effectively with the experimental data regardless the complex composition and unevenly distributed contact conditions of the actual stage system.