High power-efficiency terahertz quantum cascade laser**Project supported by the National Basic Research Program of China (Grant Nos. 2014CB339803 and 2013CB632801), the Special-funded Program on National Key Scientific Instruments and Equipment Development, China (Grant No. 2011YQ13001802-04), and the National Natural Science Foundation of China (Grant No. 61376051).

Abstract

We demonstrate continuous-wave (CW) high power-efficiency terahertz quantum cascade laser based on semi-insulating surface-plasmon waveguide with epitaxial-side down (Epi-down) mounting process. The performance of the device is analyzed in detail. The laser emits at a frequency of ∼ 3.27 THz and has a maximum CW operating temperature of ∼ 70 K. The peak output powers are 177 mW in pulsed mode and 149 mW in CW mode at 10 K for 130-μm-wide Epi-down mounted lasers. The record wall-plug efficiencies in direct measurement are 2.26% and 2.05% in pulsed and CW mode, respectively.