A miniaturized 2.45 GHz ECR ion source at Peking University**Project supported by the National Basic Research Program of China (Grant No. 2014CB845502) and the National Natural Science Foundation of China (Grant No. 11575013).

Abstract

A miniaturized 2.45 GHz permanent magnet electron cyclotron resonance (PMECR) ion source, which has the ability of producing a tens-mA H+ beam, has been built and tested at Peking University (PKU). Its plasma chamber dimension is Φ30 mm × 40 mm and the whole size of the ion source is Φ180 mm × 130 mm. This source has a unique structure with the whole source body embedded into the extraction system. It can be operated in both continuous wave (CW) mode and pulse mode. In the CW mode, more than 20 mA hydrogen ion beam at 40 kV can be obtained with the microwave power of 180 W and about 1 mA hydrogen ion beam is produced with a microwave power of 10 W. In the pulse mode, more than 50 mA hydrogen ion beam with a duty factor of 10% can be extracted when the peak microwave power is 1800 W.