Abstract
This paper presents the design and characterization of a high-power RF microelectromechanical systems switched capacitor. The switch is based on a 4-μm-thick metal plate and four symmetrical springs. The design has low sensitivity to residual stress and stress gradients. -parameter measurements result in Cu = 0.01 pF, Cd = 0.63 pF (Cr = 6.3), a power handling >;10 W using hot switching conditions, and a switching time of ~20 μs. The pull-down voltage ( -55 V) and release voltage (Vr = 25-30 V) are stable to +/-4 V over 25°C-125°C. The design can be arrayed for -bit switched-capacitor networks. Applications areas are in high-power phase shifters and tunable filters.
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