Abstract

Semi-polar micro-LEDs have gain increasing interests due to the advantages of polarization control and quantum efficiency improvement. In this work, a novel semi-polar (20–21)-plane micro-LEDs array has been designed and manufactured. In comparison with c-plane micro-LEDs, semi-polar micro-LEDs indicate better electrical and optical performance. The relative EQE of semi-polar micro-LEDs remains at 62% under the injected current density of 775.6 A/cm2, which indicates a reduced efficiency droop due to less polarization in MQWs. It has been further proved by a significant reduction of 55% in emission peak blue-shift under the injected current density from 11.1 A/cm2 to 775.6 A/cm2. In addition, the carrier recombination dynamics and spatial light distribution of semi-polar micro-LEDs with different pixel sizes have been studied. Fast recombination lifetime in smaller size semi-polar micro-LEDs indicates a promising way to be used as a high modulation bandwidth light source. Stable and uniform light distribution in a wider range of spatial azimuths further supports for the semi-polar micro-LEDs as a strong candidate for the applications of high-resolution display and high-speed visible light communication.

Highlights

  • Micro-Leds have gained increasing interests in the field of high-resolution display and high speed visible light communication [1], [2]

  • It can be roughly estimated that the EL peak drift of semi-polar micro-LEDs is greatly reduced by about 55% compared with that of c-plane micro-LEDs

  • The relative external quantum efficiency (EQE) of c-plane and semi-polar micro-LED samples is estimated with respect to the increasing current density

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Summary

Introduction

Micro-Leds have gained increasing interests in the field of high-resolution display and high speed visible light communication [1], [2]. Micro-LED with smaller pixel size could reduce RC time, and semi-polar InGaN/GaN MQWs with less QCSE could have faster radiative recombination, semi-polar micro-LEDs provide a potential candidate for improving the modulation characteristics for visible light communication applications. In this work, (20–21)-plane semi-polar micro-LEDs structures were designed and fabricated for the first time, whose electrical and optical properties are analyzed and compared with conventional c-plane micro-LEDs. In addition, the carrier recombination dynamics and spatial light distribution of semi-polar micro-LEDs with different sizes have been studied for the sake of achieving high-resolution display and high-speed modulation, which hold a huge potential for fast visible light communication

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