Abstract
We have developed a thermal microscope which has an InSb detector and optics optimized for the camera. Using this system, we evaluated maximum resolution of a 30×/numerical aperture 0.71 lens made of silicon and germanium, and achieved the cutoff frequency of around 300 line pairs/mm, which is almost a diffraction-limited performance. The thermal microscope is installed on the THEMOS-1000, a product of Hamamatsu Photonics, for thermal emission analysis.
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