Abstract

A process technology for a pseudomorphic high electron mobility transistor (P-HEMT) with an offset-gate structure has been developed for millimeter-wave monolithic microwave ICs (MMICs). A HEMT with the offset-gate structure showed both reduced gate-to-drain capacitance and drain conductance compared with a device with a non-offset-gate structure. The device showed a maximum available gain (MAG) of 9 dB at 77 GHz. The device was applied to a 77 GHz three-stage power amplifier, which showed a small-signal gain of 16.5 dB. Under preliminary life testing, this amplifier showed a stable small-signal gain for over 160 hours of testing at 175°C.

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