Abstract
We report on the efficient generation of high-order harmonics in helium gas inside complex glass micro-devices fabricated by femtosecond laser micromachining. By exploiting the three-dimensional capabilities and extreme flexibility of this fabrication technique we developed fluidic micro-structures in a fused-silica substrate that allowed us to achieve accurate control of the gas density inside a micrometer-sized microchannel. As a result, we achieved a broadband spectrum of extreme ultraviolet (XUV) radiation which extends up to 200 eV and we observed a considerable increase in the harmonics generation efficiency if compared with traditional harmonic generation in gas jets. We foresee that the application of femosecond-laser-micromachined glass devices to high-order harmonics generation can be extended to more complex on-chip systems including different functionalities, thus opening the possibility to future miniaturization of XUV and Attosecond beamlines.
Highlights
High-order Harmonic Generation (HHG) is a strongly non-linear optical process driven by intense and ultrashort laser pulses in matter
We demonstrate for the first time the generation of high order harmonics in noble gas in a glass microfluidic device fabricated through femtosecond laser micromachining
All the HHG spectra are affected by the second-order dispersion of the grating, which is responsible for the presence of extra-peaks at longer wavelengths
Summary
High-order Harmonic Generation (HHG) is a strongly non-linear optical process driven by intense and ultrashort laser pulses in matter. This process involves the emission of a burst of coherent radiation, collinear to the driving beam, with a characteristic comb-like spectrum of odd harmonics of the fundamental laser field, ranging from the vacuum ultraviolet to the soft x rays [1,2,3]. We demonstrate for the first time the generation of high order harmonics in noble gas in a glass microfluidic device fabricated through femtosecond laser micromachining This result opens the extremely attractive perspective of developing more compact and easy-to-handle XUV and attosecond beamlines
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