Abstract

The resolution of a magnetic domain image in the backscattered electron mode of a high voltage scanning electron microscope was determined from the diameter of an electron probe. The probe diameter was reduced from 2 µm to 0.06 µm by attaching an objective lens whose magnetic field around the specimen was shielded. The maximum magnification giving a clear image was improved from 100 to 3000× by attaching the shielded objective lens. The shape of zig-zag domains (about 1.9 µm spacing) appearing on the crossed region between the in-plane domain and the stripe domain of amorphous 80%Fe-8%Si-12%B ribbon was clearly resolved by using the shielded objective lens.

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