Abstract
The ability to perform noninvasive logic analysis at the internal points of integrated circuits is crucial in the design and test of advanced microelectronics. We present a noncontact scanning probe technique for extracting high-frequency digital patterns at internal points of an integrated circuit. The digital waveforms are determined by sensing the localized electrostatic force between a small probe and point on the circuit being measured. The force is monitored by detecting the deflection of the probe using a fiber-optic interferometer. The bandwidth of force measurements made using proximal probes are typically limited by the mechanical frequency response of the probe. In the presented instrument high-frequency bit-by-bit digital pattern measurements are enabled by using a pulse sampled heterodyne technique. In conjunction with a nulling approach, the technique is capable of measurements without complex calibration or probe positioning, and can be performed over passivated structures. A simple procedure is also presented which corrects errors due to nonidealities of the pulse sampling waveform. Using a probe with a kHz resonant frequency, Mbit/s patterns have been measured. Errors due to coupling from adjacent signal lines and due to surface charge effects are examined.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
More From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.