Abstract
(FeCo)-(SiO2) nanogranular films in which magnetic metal particles form nanosized columns, nanocolumnar, were studied. The nanostructure was formed by controlling the composition ratio of magnetic metal and insulating oxide. Inducing uniaxial anisotropy in the film plane resulted in high permeability in the GHz band and a high ferromagnetic resonance frequency. To improve the permeability loss factor, crystallinity of FeCo was controlled by adding B and Nb. As a result, an amorphous nanocolumnar film with ferromagnetic resonance frequency of greater than 5 GHz, high relative permeability of 44.9, and low loss factors of less than 1% up to 1 GHz was achieved.
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