High energy-storage performance of 0.9Pb(Mg1/3Nb2/3)O3-0.1PbTiO3 relaxor ferroelectric thin films prepared by RF magnetron sputtering

Abstract

0.9Pb(Mg1/3Nb2/3)O3-0.1PbTiO3 (PMN-PT 90/10) relaxor ferroelectric thin films with different thicknesses were deposited on the LaNiO3/Si (100) by the radio-frequency (RF) magnetron sputtering technique. The effects of thickness and deposition temperature on the microstructure, dielectric properties and the energy-storage performance of the thin films were investigated in detail. X-ray diffraction spectra indicated that the thin films had crystallized into a pure perovskite phase with a (100)-preferred orientation after annealed at 700°C. Moreover, all the PMN-PT 90/10 thin films showed the uniform and crack-free surface microstructure. As a result, a larger recoverable energy density of 31.3J/cm3 was achieved in the 750-nm-thick film under 2640kV/cm at room temperature. Thus, PMN-PT 90/10 relaxor thin films are the promising candidate for energy-storage capacitor application.