Abstract
Results of experimental and theoretical studies on gas selective properties of polyvinyltrimethylsilane (PVTMS) under bombardment with 50–150 keV C + and Ar + ions with doses of 5×10 14−10 16 cm −2 are presented. It was found that permeability and selectivity for various gases change essentially under high-energy irradiation. This effect depends on ion type and energy, implantation dose, and is conditioned by peculiarities of the interaction of the ion-polymer system and processes of defect formation and excitation of the electronic subsystem.
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