Abstract
Silicon microstrip line devices with 260 nm planar microfluidic channels are fabricated and used to investigate water dielectric saturation effects. Microwave scattering parameter measurements are conducted from 1 to 16 GHz under different uniform dc electric fields. When the applied dc field is increased to approximately 1 MV/cm, the measured transmission coefficient S(21) is increased up to 18 dB, which indicates a large change in water dielectric properties. Extracted water permittivity (epsilon=epsilon'+jepsilon") shows that epsilon' and epsilon" are changed up to 70% and 50%, respectively.
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