Abstract
High efficiency compact mirrors and branched waveguides which can be integrated on LSI chips have been developed. The Al capped bent optical waveguides efficiently change the light direction. The Al capping also reduces the light propagation loss of the optical waveguide from 1.8 to 0.6 dB/cm. Various micromirror shapes have been investigated and a reflectivity of 81% has been obtained for a double-reflection micromirror with a corner radius of 34 µm. Using the micromirrors, compact four-branch waveguides have also been designed and fabricated.
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