Abstract
A novel Heterodyne Phase Shifting Interferometer (HPSI) with nano-radians resolution and tens of milli-radians measurement range is developed. Instead of using a PZT-driven mirror to generate phase shift, the interferometer uses the heterodyne scheme. Such that the non-linearity and hysteresis effects of PZT are overcome. The non-linearity within the full range is less than 0.0005. Applying an intensity-modulated beam to test the angular measurement performance, the angular measurement noise level is 1.5nrad/Hz1/2. Due to the large dynamical range and good linearity, this HPSI is a good choice for precision angular metrology.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
