Abstract
This paper proposes a three-degree-of-freedom motion error measurement system based on Mach–Zehnder interferometry. The system consisted of an optical flat, beam-splitting prisms, and a reflector. When the stage was moving, the straightness error of the linear guides changed the optical path difference, which in turn caused a phase shift in the interferogram. This phase shift could be calculated by utilizing an image processing algorithm that was also developed during this study. The 3-DOF straightness errors, which included one linear error and two angular errors could be calculated. A commercial laser interferometer and a chromatic confocal sensor were used as reference sensors. The experimental results showed that the linear and angular measurement errors of the system were within ± 0.05 μm and ± 0.3″, respectively over measurement ranges of 100 mm and 60″. The repeatability, which was expressed by the standard deviation, was within 40 nm and 0.3″ for the linear and angular measurements, respectively. The proposed Mach-Zehnder interferometer has been successfully applied in a high-accuracy 3D surface topographic measurement system. It was able to effectively compensate the motion error and improve the accuracy for surface profiling.
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