Abstract
Pulsed power is widely used for the excitation of pulsed lasers, especially the ultraviolet excimer lasers. Experiments have been carried out to demonstrate the excitation of KrF excimer laser by using pulsed power generator based on linear transformer driver (LTD) <xref ref-type="bibr" rid="ref1" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">[1]</xref> . In this article, the LTD system has been upgraded by replacing the semiconductor switches with silicon carbide (SiC) devices in order to increase the output current and by reshaping the output interface so that it fits better with the geometry of the laser chamber. For excimer laser application, the output current and its rise time are very important issues. These are the focus points of the system design and performance analysis for this study. The experimental test system is described in detail and the results are presented with discussions on potential applications.
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