Abstract
The ECR ion source is designed for the production of high-current ion beams of various gaseous elements. The ion source consists of a cylindrical discharge chamber, solenoidal coils for generation of the magnetic field along the chamber axis, three electrode accel–decel ion extraction system and a microwave power supply system. Beams of oxygen, nitrogen and hydrogen ions with a current up to 75 mA have been produced. The atomic ion content of the beam exceeds 70%.
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Schedule a callMore From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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