Abstract
Amorphous (SmT) films were investigated to assess their potential use in metal-insulator-metal (MIM) capacitors. A thick SmT film showed a high capacitance density of with a low leakage current density of at . The capacitance density increased with decreasing film thickness to for the thick film. The thick SmT film had small quadratic and linear voltage coefficients of capacitance of and , respectively, and a temperature coefficient of capacitance of at . Overall, amorphous SmT films are good candidate materials for MIM capacitors.
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