Abstract
A platform for the realization of tightly-confined lithium niobate photonic devices and circuits on silicon substrates is reported based on wafer bonding and selective oxidation of refractory metals. The heterogeneous photonic platform is employed to demonstrate high-performance lithium niobate microring optical resonators and Mach-Zehnder optical modulators. A quality factor of ~7.2 × 10⁴ is measured in the microresonators, and a half-wave voltage-length product of 4 V.cm and an extinction ratio of 20 dB is measured in the modulators.
Highlights
Several unique properties of silicon allow fabrication of ultra-large-scale integrated electronic circuits with extremely high performance
We have recently developed a novel method for fabrication of nanophotonic devices in Ta2O5 using selective oxidation of the refractory metal (SORM), tantalum (Ta) [25]
By combining this reduction in Vπ.L of the device with folded-waveguide schemes, which can become possible for the first time in LiNbO3, it will be practical to reduce the footprint of LiNbO3 Mach-Zehnder optical modulators by two orders of magnitude to less than 0.5 mm × 0.5 mm and achieve a Vπ of ~1 V
Summary
Several unique properties of silicon allow fabrication of ultra-large-scale integrated electronic circuits with extremely high performance. High optical modulation performance is possible using the material, since it allows pure phase modulation with virtually no variation in optical absorption This feature allows vector signal modulation with negligible chirping for advanced telecommunication and other applications [13]. For nonlinear optical applications, due to the low intensity of the pump source in the large cross-sectional optical waveguides, the devices must be a few centimeters long in order to achieve high efficiencies [8,9]. These shortcomings have made LiNbO3 less attractive for integrated photonics, compared to semiconductors
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