Heteroepitaxial growth of La 0.7Ca 0.3MnO 3/SrTiO 3/TiN/Si by pulsed laser deposition

Abstract

Epitaxial perovskite magnetoresistive La 0.7Ca 0.3MnO 3 (LCMO) films have been successfully grown on SrTiO 3(STO)/TiN buffered (100)Si substrates by pulsed laser deposition method. The structural quality of the LCMO/STO/TiN/Si heterostructure was characterized by a four-circle X-ray diffractometer. The crystallinity of the epitaxial layers was found to improve with increased substrate temperature. An epitaxial relationship of 〈100〉LCMO//〈100〉STO//〈100〉TiN//〈100〉Si was obtained at a deposition temperature of 700°C. The electrical properties and the magnetoresistance ratio (MR) of the LCMO films were measured by a standard four-probe technique. A maximum MR ( MR= ΔR B=1.2 T /R B=0 ) of −50% was observed at 116 K in the as-grown LCMO films.