Abstract
The La<sub>0.7</sub>Ca<sub>0.3</sub>MnO<sub>3</sub> (LCMO) films were prepared by the pulse laser deposition method on Pt/Ti/SiO<sub>2</sub> /Si substrates under the O<sub>2</sub> partial pressures of 0.01Pa, 1Pa, and 10 Pa, respectively. XRD patterns show that LCMO film grown under the O<sub>2</sub> partial pressure of 0.01Pa exhibited good crystallinity and (110) preferred orientation. Due to the strong collision in the plume, the crystal quality of LCMO films grown under 1Pa and 10Pa decreased remarkably. Electrical measurements show that the LCMO films grown under low O<sub>2</sub> partial pressure has stable resistance switching property. The oxygen content but crystallinity is a key factor for the resistance switching property of LCMO film. The lack of oxygen promotes the resistance switching properties of LCMO films.
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