Heterodyne interferometric technique for displacement control at the nanometric scale

Abstract

We propose a method of displacement control that addresses the measurement requirements of the nanotechnology community and provide a traceability to the definition of the mèter at the nanometric scale. The method is based on the use of both a heterodyne Michelson’s interferometer and a homemade high frequency electronic circuit. The system so established allows us to control the displacement of a translation stage with a known step of 4.945 nm. Intrinsic relative uncertainty on the step value is 1.6×10−9. Controls of the period of repetition of these steps with a high-stability quartz oscillator permits to impose an uniform speed to the translation stage with the same accuracy. This property will be used for the watt balance project of the Bureau National de Métrologie of France.