Abstract
The Si nanowire (Si-NW) formation process has been studied to develop a new anode material for lithium ion batteries. Si-NWs were prepared by a combination of electroless metal deposition (EMD) of Ag and metal-assisted chemical etching (Mac etching) on Si substrates that have micro dot and well patterns with respect to their height. During the fabrication of Si-NWs, height reversal occurred in the micro dot and well patterns, and Si micro- and nano-hybrid systems were fabricated. We also observed structural changes of the Si micro- and nano-hybrid structures during the electrochemical charge/discharge process of lithium ions, and showed that this hybrid system is robust for the volume change accompanied with the lithiation/delithiation reaction.
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