Abstract
We have developed an improved approach to Rutherford backscattering spectrometry (RBS) which has hundreds of times greater sensitivity to medium-to-heavy surface impurities than conventional RBS. The basis of this technique is to use a medium-energy (~ a few 100 keV) heavy ion beam for analysis (eg. 400 keV C +); the key innovation is the use of a thin (~ 200 nm), self-supporting carbon foil in front of the surface-barrier detector to range out particles scattered from the substrate. Using this technique, called heavy ion backscattering spectrometry (HIBS), we have demonstrated sensitivity of better than 10 11 at. cm 2 for Au on a Si substrate.
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