Abstract
We report on a new process to make thin carbon films using ion beam sputtering (Ar and H2 mixture) from a graphite target followed by impulse electron beam on the sputter deposited film. The thin carbon films studied by x-ray diffraction showed a preferred orientation of carbon chains perpendicular to the substrate surface. The IR and Raman spectroscopic data have been interpreted as indicating the formation of polyyne and cumulene structures in the thin carbon films.
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