Abstract
Atmospheric-pressure cw high-density plasma can be produced in a microgap between two knife-edge electrodes by microwave excitation. A possible application of such a plasma is as an excimer light source and for this purpose the gas temperature in the plasma is a particularly important parameter. In this paper we report a fluid dynamic simulation of heat transport in the microgap plasma and compare the results with previously studied experimental gas temperature characteristics (e.g., dependence on the microwave power and the forced gas flow rate). The simulation explains reasonably well the experimental results when the effect of local gas density change on the gas heating process is taken into consideration. Discussion is given that the existence of thermally driven convection in the microgap plasma indicated in a preliminary report is incorrect.
Published Version
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