Abstract
In this article, the results obtained from a study carried out on the some elements-incorporated diamond-like carbon (DLC) films are reported. All the films were deposited using plasma-based ion implantation (PBII) technique. The deposited films were annealed at 400℃, 650℃ and 900℃ in an air atmosphere for 1 hour. The effects of adding hydrogen, silicon/oxygen and silicon/nitrogen into the DLC film on chemical composition, friction coefficient and corrosion resistance were investigated. The films coated micro end mills performance was also assessed. The results indicate that all the films showed almost constant atomic contents of C, Si, O and N until annealing at 400℃. However, the films were completely destroyed at 650℃ with the increased Si and O contents, while the C content decreased. The incorporation of silicon/oxygen and silicon/nitrogen into the DLC exhibited lower values of friction coefficients than the hydrogenated DLC (DLC and H-DLC) before and after annealing at 400℃, whereas all the films presented the same values of friction coefficients after annealing at 650℃ due to the completely destroy of the films. Furthermore, the incorporation of silicon/nitrogen into the DLC also exhibited better corrosion resistance and unbroken micro end mills performance on their surfaces. Thus, the incorporation of silicon/nitrogen into the DLC film can be considered beneficial in improving the micro end mills performance.
Highlights
Micro-manufacturing is a rapidly growing worldwide industry calculated at $60 billion [1]
The carbon, silicon, oxygen and nitrogen concentrations measured at the top surface were measured using energy dispersive X-ray spectroscopy (EDS), and values are always given in units of atomic percentage
This result is consistent with the finding of Yang et al that pure diamond-like carbon (DLC) films were completely destroyed over 500 ̊C, whereas diamond-like characteristics of the Si-O-DLC films were disappeared when (a) heated to 600 ̊C [19]
Summary
Micro-manufacturing is a rapidly growing worldwide industry calculated at $60 billion [1] This rapid growth is largely due to the increased interest in fabricating micro/meso-scaled components that will expand the microand nano-scaled worlds to the macroworld [2]. Owing to the direct scale-down of macroscopic end milling, micro end milling is a material removal process that can create high aspect ratio, three-dimensional features in a single step [2]-[4]. It is limited use in special clean room environments, and compatible with various engineering materials such as polymers [5], metals and metal alloys [5]-[8], and pre-sintered powder ceramics [9] [10]. Any chips adhering to the tool will eliminate a path for chips to void the cutting zone and will result in a spike in the cutting forces, leading to terrible tool fracture due to the low flexural strength of the tool
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