He +-induced auger electron studies in carbon-containing molecules

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He +-induced KLL Auger electron spectra of energy resolution 0.3 and 0.6 eV have been measured for incident energies of 0.45 to 2.1 MeV for several simple carbon-containing compounds (CH 4, C 2H 6, C 2H 4, C 2H 2, CO, CO 2, CF 4, and C 2F 6). The indicate that line widths and energies of major lines in the hydrocarbons and in CO induced by He + bombardment do not appear to be different from those produced by e − bombardment. Differences of more than 30% are observed in the measured relative He +-induced Auger yields, and we attempt to reproduce the observed variations in yield by scaling first to an effective carbon valence number and second with the use of electron scattering cross sections. Results of a preliminary analysis of the Auger line structure are reported.