Abstract
The damaging of 6HSiC by He + ions with 700 and 1400 keV and doses between 0.5 and 24 × 10 14 ions cm −2 was studied by IR and Raman spectroscopy. Optical modelling of the IR spectra indicates the formation of two layers: a light absorbing surface layer of disturbed crystalline material with a thickness of 1.6 and 3.1 μm, respectively, and an interface layer with a thickness of 0.3 μm and a dose-proportional increase of the refractive index. Raman spectra show a special kind of lattice distortions and decrease of the sharp bands of the crystalline bulk carbide, which is proportional to the ion dose also and is caused by the diminished transparency of the surface layers.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
