Abstract
Oxygen diffusion into c-axis-oriented YBa 2 Cu 3 O 7 - Φ epitaxial thin films was observed using real-time spectroscopic ellipsometry. The experiments were conducted under controlled atmospheres of 10% O 3 /90% O 2 and 80% O 3 /20% O 2 . At 2 x 10 - 5 torr, oxidation of the films began at temperatures as low as 100-125 °C for heating rates ≤3 °C/min. Full oxidation was seen by 190 °C at these rates. Based on these data, the activation energy of oxygen diffusion into YBa 2 Cu 3 O 7 - Φ from an ozone/oxygen atmosphere was found to be between 0.43 and 0.52 eV. This was appreciably smaller than for in-diffusion in a molecular oxygen atmosphere. Higher ozone content atmospheres did not improve the oxidation kinetics. These atmospheres did, however, delay the onset of reduction in the films by 60-70 °C at higher temperatures.
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