Abstract
We report scanning hard x-ray imaging with a monolithic focusing optic consisting of two multilayer Laue lenses (MLLs) bonded together. With optics pre-characterization and accurate control of the bonding process, we show that a common focal plane for both MLLs can be realized at 9.317 keV. Using bonded MLLs, we obtained a scanning transmission image of a star test pattern with a resolution of 50 × 50 nm2. By applying a ptychography algorithm, we obtained a probe size of 17 × 38 nm2 and an object image with a resolution of 13 × 13 nm2. The significant reduction in alignment complexity for bonded MLLs will greatly extend the application range in both scanning and full-field x-ray microscopies.
Highlights
Since its proposing as hard x-ray nanofocusing optic in 2004 [1], multilayer Laue lens (MLL) has undergone a long development path and has evolved from a novel concept to real optics for scientific applications [2, 3]
We report hard x-ray scanning imaging with a monolithic focusing optic consisting of two multilayer Laue lenses (MLLs) bonded together
With a pre-characterization and an accurate control of the bonding process, we show that a common focal plan for both MLLs can be realized at energy of 9.317 keV
Summary
Since its proposing as hard x-ray nanofocusing optic in 2004 [1], multilayer Laue lens (MLL) has undergone a long development path and has evolved from a novel concept to real optics for scientific applications [2, 3]. Niese et al used focused ion beam (FIB) to weld two MLLs together, and integrated it successfully into a full-field x-ray imaging microscope with a lab-source [12] Because they can put two lenses very close to each other, two identical MLLs may be used without introducing strong astigmatism. For the lens to survive the bonding process, the supporting substrate needs to be sufficiently thick, in order to avoid mechanical distortion This leads to an inevitably large gap between two MLLs in the rage of several hundred microns. Strong astigmatism will arise if two identical MLLs are used, making it not very useful for general scientific applications To address this issue, lenses with two different focal lengths are bonded with an accurate control of their gap. Because of the simplicity in its alignment and in the associated mechanical structure, we believe that bonded-MLLs will extend greatly its application range in both scanning and full-field imaging microscopies
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