Abstract
We report on a developed micromachined silicon platform for the precise assembly of 2D multilayer Laue lenses (MLLs) for high-resolution X-ray microscopy. The platform is 10 × 10 mm2 and is fabricated on ~500 µm thick silicon wafers through multiple steps of photolithography and deep reactive-ion etching. The platform accommodates two linear MLLs in a pre-defined configuration with precise angular and lateral position control. In this work, we discuss the design and microfabrication of the platform, and characterization regarding MLLs assembly, position control, repeatability, and stability. The results demonstrate that a micromachined platform can be used for the assembly of a variety of MLLs with different dimensions and optical parameters. The angular misalignment of 2D MLLs is well controlled in the range of the designed accuracy, down to a few millidegrees. The separation distance between MLLs is adjustable from hundreds to more than one thousand micrometers. The use of the developed platform greatly simplifies the alignment procedure of the MLL optics and reduces the complexity of the X-ray microscope. It is a significant step forward for the development of monolithic 2D MLL nanofocusing optics for high-resolution X-ray microscopy.
Highlights
X-ray microscopy is a powerful characterization tool applied in many scientific fields, such as materials science, biology, environmental science, and energy research [1,2,3,4,5,6,7,8]
It significantly contributes to the development of multilayer Laue lenses (MLLs)-based high-resolution X-ray microscopy and enables a path toward sub-10 nm resolution imaging in the hard X-ray regime
The 1D MLL optics used in our work was fabricated via magnetron sputtering deposition on a silicon substrate and further sectioned by reactive-ion etching followed by focused ion beam (FIB) milling [33]
Summary
X-ray microscopy is a powerful characterization tool applied in many scientific fields, such as materials science, biology, environmental science, and energy research [1,2,3,4,5,6,7,8]. 2 2ofof established, alignment must be maintained for the entire duration of an experiment, which spans which hours or days (especially for tomographic, 3D imaging). Such experimental over spans many over hoursmany or days While the HXN instrument works well for many experiments with a point focus of ~10 nm, the ofalignment two 1D MLL optics the optics currentinsystem is a complex procedure that involvesthat eight degreeseight of of two. Nmnot resolution maydue nottobegeometrical feasible dueconstraints to geometrical of the optics itself
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