Abstract
In this paper, the electrical characteristics of Fin-type SONOS(silicon-oxide-nitride-oxide-silicon) flash memory device with different trapping layers are analyzed in depth. Two kinds of trapping layers i.e., silicon nitride(<TEX>$Si_3N_4$</TEX>) and hafnium oxide(<TEX>$HfO_2$</TEX>) are applied. Compared to the conventional Fin-type SONOS device using the <TEX>$Si_3N_4$</TEX> trapping layer, the Fin-type SOHOS(silicon-oxide-high-k-oxide-silicon) device using the <TEX>$HfO_2$</TEX> trapping layer shows superior program/erase speed. However, the data retention properties in SOHOS device are worse than the SONOS flash memory device. Degraded data retention in the SOHOS device may be attributed to the tunneling leakage current induced by interface trap states, which are supported by the subthreshold slope and low frequency noise characteristics.
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