Abstract
Detection of trace-level hydrogen sulfide (H2S) gas is of great importance whether in industrial production or disease diagnosis. This research presents a novel H2S gas sensor based on integrated resonant dual-microcantilevers which can identify and detect trace-level H2S in real-time. The sensor consists of two integrated resonant microcantilever sensors with different functions. One cantilever sensor can identify H2S by outputting positive frequency shift signals, while the other cantilever sensor will detect H2S as a normally used cantilever sensor with negative frequency shifts. Combined the two cantilever sensors, the proposed gas sensor can distinguish H2S from a variety of common gases, and the detection limit to H2S of the sensor is as sensitive as below 1 ppb.
Published Version
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