Guided wrinkling with nanoimprinted SU-8 surfaces

Abstract

The wrinkling of SU-8 may be useful for microelectromechanical systems and optical applications, but highly regular and periodic wrinkles are the most convenient for such applications. This paper reports wrinkles generated on SU-8 by exposure to 172 nm-wavelength ultraviolet under ozone. To identify the relevant processing parameters, the impact of the SU-8 layer thickness and the effects of the postexposure bake temperature and UV-ozone treatment time are investigated. With 5 μm-thick SU-8 layers, distinct wrinkles are obtained with an ultraviolet-ozone treatment of 3 min and at a postexposure bake temperature of at least 140 °C. To guide the wrinkling, topography is induced on the SU-8 surface via capillary force lithography. By using a stamp with equidistant cavities possessing different widths, the structure size dependence is investigated. Owing to local stress relaxation, single or double wrinkles form along the elevated lines depending upon the line width. Within the gaps between the lines, wrinkles oriented perpendicular to the lines develop induced by the nonrelaxed compressive stress. Wrinkling represents a simple alternative for covering the surface of SU-8 with largely self-forming regular structures that may act as transmissive optical elements.