Abstract
Well textured c-axis normal Y 1Ba 2Cu 3O 7−δ (YBCO) thin films on yttria-stabilized zirconia(YSZ) substrates whose crystalline axes are tilted by 45°, 30°, 20°, 10°, 0° (untilted) with respect to the surfaces have been fabricated using dc-sputtering. CeO 2 buffer layers of the same thickness, 15 Å, were deposited on all substrates prior to YBCO deposition. For untilted crystalline YSZ substrate, an oxygen ion milling on its surface is necessary. Microscopic effects of the ion milling were investigated by X-ray photoelectron spectroscopy and atomic force microscope. The crystalline qualities of the YBCO films were investigated by X-ray diffraction 2 θ and Ф-scan measurements. For all films, the measured zero resistance temperatures ( T c's) and critical current densities ( J c's) were 84–85 K and above 10 6 A/cm 2 at 77 K, respectively.
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