Abstract
Application of catalyst on SiC wafer resulted in the formation of one-dimensional (1D) vertically aligned carbon nanostructures at low temperature and vacuum values (compared to SiC decomposition) without extra carbon supply into the system. Resulting nanostructures were characterized using scanning electron microscopy and Raman spectroscopy. The effect of catalyst amount is discussed and a mechanism for the 1D carbon nanostructure formation through SiC decomposition in the presence of catalyst is proposed.
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More From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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