Growth of nanocrystalline β-silicon carbide and nanocrystalline silicon oxide nanoparticles by sol gel technique

Abstract

Nanocrystalline cubic silicon carbide (β-SiC) nanoparticles along with nanocrystalline silicon oxide nanoparticles were grown by using a sol gel technique. A homogenous gel was obtained from the solution of tetraethylorthosilicate, citric acid and ethylene glycol mixed in fixed molar ratio. The gel was dried in high temperature reducing atmosphere of hydrogen gas. X-ray diffraction studies showed growth of both crystalline silicon carbide and crystalline silicon oxide structures. Transmission electron microscopy (TEM), selected area electron diffraction (SAED) and in-situ energy dispersive X-ray spectroscopy (EDS) confirmed the existence of nanocrystalline silicon oxide along with nanocrystalline β-silicon carbide nanoparticles.