Abstract
Non-polar ZnO:Na films were deposited on r-plane sapphire substrates with different Na doping concentration by pulsed laser deposition. Based on the X-ray diffraction (XRD) and scanning electron microscope (SEM) analysis, the ZnO:Na films with Na concentration from 1% to 2% exhibit unique non-polar <11–20> orientation and those films deposited with Na concentration above 2% present <0001> and <11–20> mixed orientations. Anisotropic stripes-like morphology can be observed for the Na content below 2%. A stable p-type non-polar ZnO:Na film was obtained by doping 2% Na, and X-ray photoelectron spectroscopy (XPS) exhibited the presentation of NaZn acceptor, which was the origin of p-type behavior.
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