Growth of Metamorphic InGaAs on GaAs (111)A: Counteracting Lattice Mismatch by Inserting a Thin InAs Interlayer

Abstract

We have successfully grown high quality InxGa1–xAs metamorphic layer on GaAs (111)A using molecular beam epitaxy. Inserting a thin 3.0–7.1 monolayer (ML) InAs interlayer between the In0.25Ga0.75As and GaAs allowed the formation of a nearly lattice-relaxed In0.25Ga0.75As with a very flat upper surface. However, when the thickness of the inserted InAs is thinner or thicker than these values, we observed degradation of crystal quality and/or surface morphology. We also revealed this technique to be applicable to the formation of a high quality metamorphic InxGa1–xAs layer with a range of In compositions (0.25 ≤ x ≤ 0.78) on GaAs (111)A. Cross-sectional scanning transmission electron microscope studies revealed that misfit dislocations formed only at the interface of InAs and GaAs, not at the interface of In0.25Ga0.75As and InAs. From the dislocation density analysis, it is suggested that the dislocation density was decreased by growing In0.25Ga0.75As on InAs, which effectively contribute the strain relaxatio...