Abstract
A CuAlO2 (CAO) bottom gate top contact p-type thin film transistor (TFT) is demonstrated. The CAO thin film is synthesized through a digitally processed DC sputtering (DPDS) technique, employing a precise layer-by-layer (LBL) deposition strategy. X-ray diffraction analysis exhibited distinct peaks beyond 600 °C. The CAO film shows a dominant phase along the (004) plane at the elevated temperature of 990 °C. The fabricated CAO p-TFT exhibits field effect mobility of 4.1 cm2 V−1 s−1. In addition, the p-TFT characteristics were observed even in the as-deposited CAO film. The DPDS-assisted LBL approach offers a promising pathway for controlled stacking deposition routes in the growth of CAO thin films, enabling enhanced performance and device integration.
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