Growth of carbon nanofibers and related structures by combined method of plasma enhanced chemical vapor deposition and aerosol synthesis

Abstract

Growth of carbon nanofibers and nanotubes by combination of aerosol synthesis and plasma-enhanced catalytic chemical vapor deposition with alcohol as carbon precursor is presented. Only a hollow cathode glow discharge (HCGD) is used as gas activation process without any specific heating of the substrate. Specially designed hollow cathode enables the evaporation of catalyst directly on the substrate for catalytic growth. Product of physical vapor deposition process was examined by energy dispersive X-ray spectrometer (EDS). Spectroscopic features of the plasma were monitored by optical emission spectroscopy (OES). Carbon deposition was examined using scanning electron microscopy (SEM) and transmission electron microscopy (TEM). Catalytic nanofibers and multi-walled carbon nanotubes with outer diameters 20–60 nm have been observed.