Abstract
We report the growth of a multilayer garnet crystal double-clad waveguide structure by pulsed laser deposition (PLD). The structure, grown on a Y 3Al 5O 12 (YAG) (100) substrate, was fabricated from the sequential deposition of Y 3Ga 5O 12 (YGG), Nd,Cr:Gd 3Sc 2Ga 3O 12, YGG and YAG, each layer being about 1 μm in thickness. X-ray diffraction analysis has shown that the layers all grew in the epitaxial (100) orientation and energy dispersive X-ray analysis has revealed that the layer compositions are close to those of the target materials. This trial fabrication is an indication of the capability of PLD to produce designer multilayer planar waveguide structures.
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