Abstract
Elastic scattering of laser light has been used to monitor surface topography in real time during growth of Si1−xGex heterostructures. Large increases in scattered intensity were caused by surface height fluctuations in the alloy layers which, after growth, could be imaged in cross section by transmission electron microscopy and in plan view by scanning optical microscopy. For pseudomorphic alloy layers (x=0.19±0.01) grown at 750 °C the surface height fluctuations were periodic, the wavelength of approximately 270 nm giving strong laser scattering. Plan view transmission electron micrographs on such a layer showed periodic strain fluctuations with the same wavelength, whereas an equivalent layer grown at 610 °C showed strain fluctuations which were irregular in shape and spatial distribution. The intensity of light scattered from the surface of this layer was much lower. Thick alloy layers grown beyond the critical thickness for appearance of misfit dislocations showed strong scatter which increased more quickly in intensity at higher growth temperature.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
