Abstract
Growth dynamics and unit cell migration of ferroelectric (Ba,Sr)TiO3 thin films were systematically studied with in situ reflective high-energy electron diffraction and atom force microscopy. By measuring the amplitudes of slow surface recovery oscillations of SrTiO3 film grown on (001) SrTiO3 surface, the activation energy of unit cell surface self-diffusion was surprisingly found to be only 0.29±0.01eV. A “unit-cell migration” model was developed to understand the epitaxial growth dynamics of ferroelectric thin films, which is a critical issue in oxide thin film growth and crucial in controlling the atomic structures.
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