Abstract
The ferroelectric BaTiO 3(001) ultrathin film (10 nm) was grown epitaxially on SrTiO 3(001) substrate by laser molecular beam epitaxy (MBE). The growth process of the BaTiO 3 thin film was characterized by in situ intensity oscillation of reflection high energy electron diffraction, showing a unit cell layer-by-layer growth mode. The atomically smooth surface of BaTiO 3 film has been observed by atomic force microscopy with a root mean square surface roughness of 0.2 nm. The top-most surface for the high c-oriented BaTiO 3 thin film was analyzed by angle-resolved X-ray photoelectron spectroscopy (ARXPS), indicating the BaTiO 3 film is predominantly terminated with TiO 2 atomic plane.
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