Abstract
The investigation of phase transformations in indium selenide films during step selenization processes at 200, 350, 400 and 580°C was carried out. It was found that the phase transformations in films are accompanied by recrystallization processes which promote the growth of large crystalline films. Large-crystalline In2Se3 films are formed at last stage of selenization. Superstructure reflections which can be explained by odered vacancy arrays and therefore indicated a Se deficiency in In2Se3 grains were observed. Large crystalline CuInSe2 films have been grown on the base of the In2Se3 films.
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